Society of Photo-optical Instrumentation Engineers & Lin, B. J. (1988). Optical/laser microlithography: 2-4 March 1988, Santa Clara, California. The Society.
Chicago Style (17th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Burn Jeng Lin. Optical/laser Microlithography: 2-4 March 1988, Santa Clara, California. Bellingham, Wash., U.S.A.: The Society, 1988.
MLA (8th ed.) CitationSociety of Photo-optical Instrumentation Engineers and Burn Jeng Lin. Optical/laser Microlithography: 2-4 March 1988, Santa Clara, California. The Society, 1988.
Warning: These citations may not always be 100% accurate.