Optical/laser microlithography IV : 6-8 March 1991, San Jose, California /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Pol, Victor
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1991]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1463.
Subjects:	Lasers > Industrial applications > Congresses. Optical instruments > Congresses. Microlithography > Congresses.