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| 035 |
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|a (OCoLC)26219877
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| 035 |
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|9 AFQ3355AM
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| 040 |
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|a OIT
|c OIT
|d AZU
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| 049 |
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|a TXAM
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| 090 |
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|a TA1677
|b .O67 1992
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| 245 |
0 |
0 |
|a Optical/laser microlithography V :
|b 11-13 March 1992, San Jose, California /
|c John D. Cuthbert, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
|
| 264 |
|
1 |
|a Bellingham, Wash., USA :
|b SPIE,
|c [1992]
|
| 264 |
|
4 |
|c ©1992
|
| 300 |
|
|
|a 2 volumes :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings / SPIE--the international society for optical engineering ;
|v v. 1674
|
| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Lasers
|x Industrial applications
|v Congresses.
|
| 650 |
|
0 |
|a Optical instruments
|v Congresses.
|
| 650 |
|
0 |
|a Microlithography
|v Congresses.
|
| 700 |
1 |
|
|a Cuthbert, John D.
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 740 |
0 |
|
|a Optical/laser microlithography five.
|
| 740 |
0 |
|
|a Optical/laser microlithography 5.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 1674.
|
| 999 |
|
|
|a MARS
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| 999 |
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|p ric
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|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TA1677 .O67 1992
|h Library of Congress classification
|i unmediated -- volume
|k pt.2
|m A14816040918
|
| 952 |
f |
f |
|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
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|e TA1677 .O67 1992
|h Library of Congress classification
|i unmediated -- volume
|k pt.1
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