APA (7th ed.) Citation

Brodie, I., & Muray, J. J. (1992). The physics of micro/nano-fabrication. Plenum Press.

Chicago Style (17th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Micro/nano-fabrication. New York: Plenum Press, 1992.

MLA (8th ed.) Citation

Brodie, Ivor, and Julius J. Muray. The Physics of Micro/nano-fabrication. Plenum Press, 1992.