The physics of micro/nano-fabrication /

The physics of micro/nano-fabrication /

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Bibliographic Details
Main Author: Brodie, Ivor
Other Authors: Muray, Julius J.
Format: Book
Language:English
Published: New York : Plenum Press, [1992]
Series:Microdevices.
Subjects:
Microelectronics.
Thin-film circuits.
Microelectronics
Description
Physical Description:xix, 650 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0306441462