Code compliance for advanced technology facilities : a comprehensive guide for semiconductor and other hazardous occupancies /
Main Author: | |
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Format: | Book |
Language: | English |
Published: |
Park Ridge, N.J. :
Noyes Publications,
[1993]
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Series: | Materials science and process technology series.
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Subjects: |
Item Description: | Includes index. |
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Physical Description: | xv, 357 pages : illustrations ; 25 cm. |
ISBN: | 0815513380 |