$Diffractometry and scatterometry : 24-28 May 1993 /$

Diffractometry and scatterometry : 24-28 May 1993 /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers. Poland Chapter, Institute of Applied Optics (Warsaw, Poland)
Other Authors:	Pluta, Maksymilian, Szyjer, Mariusz
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1994]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1991.
Subjects:	Diffraction > Congresses. Optical instruments > Design and construction > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/1991.toc