Microelectronic structures and MEMS for optical processing IV : 21-22 September 1998, Santa Clara, California /

Microelectronic structures and MEMS for optical processing IV : 21-22 September 1998, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Motamedi, M. Edward, Herzig, Hans Peter
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3513.
Subjects:
Microelectronics > Congresses.
Microelectromechanical systems > Congresses.
Optoelectronics > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7874 .M46 1998
 
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TK7874 .M46 1998 Available