Sputtering threshold energies of heavy ions /

Bibliographic Details

Main Author:	Mantenieks, Maris A.
Corporate Author:	NASA Glenn Research Center
Format:	Government Document Book
Language:	English
Published:	[Cleveland, Ohio] : National Aeronautics and Space Administration, Glenn Research Center ; [1999]
Series:	NASA technical memorandum ; 209273.
Subjects:	Heavy ions. Threshold voltage. Sputtering. Electric potential. Molybdenum. Xenon.