Process and equipment control in microelectronic manufacturing II : 30-31 May 2001, Edinburgh, UK /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers
Other Authors:	Fallon, Martin
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2001]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4405.
Subjects:	Microelectronics industry > Production control > Congresses. Integrated circuits > Very large scale integration > Design and construction > Congresses. Microelectronics > Materials > Congresses.