Tay, F. E. H. (2002). Materials & process integration for MEMS. Kluwer.
Chicago Style (17th ed.) CitationTay, Francis E. H. Materials & Process Integration for MEMS. Boston: Kluwer, 2002.
MLA (8th ed.) CitationTay, Francis E. H. Materials & Process Integration for MEMS. Kluwer, 2002.
Warning: These citations may not always be 100% accurate.