Materials & process integration for MEMS /
Other Authors: | |
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Format: | Book |
Language: | English |
Published: |
Boston :
Kluwer,
[2002]
|
Series: | Microsystems (Series) ;
v. 9. |
Subjects: |
Physical Description: | xix, 299 pages : illustrations ; 25 cm. |
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Bibliography: | Includes bibliographical references and index. |
ISBN: | 1402071752 (alk. paper) |