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020801s2002 maua b 001 0 eng |
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|a 2002031635
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|a GBA2-V8693
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|a 1402071752 (alk. paper)
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|a (OCoLC)ocm50272747
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|a TK7875
|b .M373 2002
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|a TK
|2 lcco
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| 082 |
0 |
0 |
|a 621.381
|2 21
|
| 245 |
0 |
0 |
|a Materials & process integration for MEMS /
|c edited by Francis E.H. Tay.
|
| 246 |
3 |
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|a Materials and process integration for MEMS
|
| 264 |
|
1 |
|a Boston :
|b Kluwer,
|c [2002]
|
| 264 |
|
4 |
|c ©2002
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| 300 |
|
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|a xix, 299 pages :
|b illustrations ;
|c 25 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Microsystems ;
|v v. 9
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems.
|
| 700 |
1 |
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|a Tay, Francis E. H.
|
| 830 |
|
0 |
|a Microsystems (Series) ;
|v v. 9.
|
| 938 |
|
|
|a Otto Harrassowitz
|b HARR
|n har025029127
|c 128.00 DEM
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| 948 |
|
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|a cataloged
|b h
|c 2002/12/5
|e cmulkey
|f 7:59:39
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|b TXA
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|t 0
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| 952 |
f |
f |
|p normal
|a Texas A&M University
|b College Station
|c Sterling C. Evans Library
|d Evans: Library Stacks
|t 0
|e TK7875 .M373 2002
|h Library of Congress classification
|i unmediated -- volume
|m A14829569256
|
| 998 |
f |
f |
|a TK7875 .M373 2002
|t 0
|l Evans: Library Stacks
|