Optical MEMS for chemical analysis and biomedicine /
Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others. This boo...
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| Format: | eBook |
| Language: | English |
| Published: |
London, United Kingdom :
The Institution of Engineering and Technology,
2016.
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| Series: | Materials, circuits and devices series ;
25. |
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| Online Access: | Connect to the full text of this electronic book |