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  1. 1
    Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots, Napa Valley, California, 11-14 February 1990 /
    Published 1990
    Subjects: “...Robotics Congresses....”
    Conference Proceeding Book
  2. 2
    Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings /
    Published 1992
    Subjects: “...Robotics Congresses....”
    Conference Proceeding Book
  3. 3
    IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings /
    Published 1993
    Subjects: “...Robotics Congresses....”
    Conference Proceeding Book
  4. 4
    Proceedings, IEEE micro electro mechanical systems /
    Published 1995
    Conference Proceeding Book
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