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NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania
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Pauleau, Y.
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Nanotechnology
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NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania
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Chemical physics of thin film deposition processes for micro- and nano-technologies /
Published 2002
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NATO Advanced Study Institute on Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies Kaunas, Lithuania
North Atlantic Treaty Organization. Scientific Affairs Division
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Pauleau, Y.
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