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  1. 41
    MEMS 2003 : IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003 /
    Published 2003
    Subjects: “...Microelectromechanical systems Congresses....”
    Conference Proceeding Book
  2. 42
    Micromechatronics /
    by Uchino, Kenji, 1950-
    Published 2003
    Subjects: “...Microelectromechanical systems....”
    Book
  3. 43
    Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems.
    Published 1992
    Subjects: “...Microelectromechanical systems Periodicals....”
    Journal
  4. 44
    Micromachines as tools for nanotechnology /
    Published 2003
    Subjects: “...Microelectromechanical systems....”
    Book
  5. 45
    Micromechatronics : modeling, analysis, and design with MATLAB /
    by Giurgiutiu, Victor
    Published 2004
    Subjects: “...Microelectromechanical systems....”
    Book
  6. 46
    MEMS mechanical sensors /
    Published 2004
    Subjects: “...Microelectromechanical systems....”
    Book
  7. 47
    Numerical simulation of mechatronic sensors and actuators /
    by Kaltenbacher, Manfred, 1968-
    Published 2004
    Subjects: “...Microelectromechanical systems....”
    Book
  8. 48
    Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
    by Lyshevski, Sergey Edward
    Published 2005
    Subjects: “...Microelectromechanical systems....”
    Book
  9. 49
    Intelligent integrated microsystems : 19-21 April 2006, Kissimmee, Florida, USA /
    Published 2006
    Subjects: “...Microelectromechanical systems Congresses....”
    Book
  10. 50
    Self assembly : the science of things that put themselves together /
    by Pelesko, John A.
    Published 2007
    Subjects: “...Microelectromechanical systems....”
    Table of contents only
    Book
  11. 51
    Reliability of MEMS /
    Published 2008
    Subjects: “...Microelectromechanical systems Reliability....”
    Book
  12. 52
    MEMS vibratory gyroscopes : structural approaches to improve robustness /
    by Acar, Cenk
    Published 2008
    Subjects: “...Microelectromechanical systems....”
    Book
  13. 53
    Micromechatronics /
    by Uchino, Kenji, 1950-
    Published 2003
    Subjects: “...Microelectromechanical systems....”
    Connect to the full text of this electronic book
    eBook
  14. 54
    Photonic MEMS devices : design, fabrication and control /
    by Liu, Ai-Qun
    Published 2009
    Subjects: “...Microelectromechanical systems....”
    Book
  15. 55
    Fabrication and testing of a novel MEMS rotational thermal actuator /
    by Gee, Danny
    Published 2007
    Subjects: “...Microelectromechanical systems....”
    Get full text
    Government Document eBook
  16. 56
    Micromechatronics : modeling, analysis, and design with MATLAB /
    by Giurgiutiu, Victor
    Published 2009
    Subjects: “...Microelectromechanical systems....”
    Publisher description
    Contributor biographical information
    Book
  17. 57
    LIGA and its applications /
    Published 2009
    Subjects: “...Microelectromechanical systems....”
    Book
  18. 58
    Reliability of MEMS /
    Published 2008
    Subjects: “...Microelectromechanical systems Reliability....”
    Connect to the full text of this electronic book
    Contributor biographical information
    Publisher description
    Table of contents only
    eBook
  19. 59
    MEMs reliability /
    by Hartzell, Allyson L.
    Published 2011
    Subjects: “...Microelectromechanical systems Reliability....”
    Connect to the full text of this electronic book
    eBook
  20. 60
    Microsystems dynamics /
    by Ostasevicius, Vytautas
    Published 2011
    Subjects: “...Microelectromechanical systems Dynamics....”
    Connect to the full text of this electronic book
    eBook
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