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1Published 1982“...SPIE--The International Society for Optical Engineering,...”
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2Published 1985“...SPIE--the International Society for Optical Engineering,...”
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3Published 1986“...SPIE--the International Society for Optical Engineering,...”
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4Optical microlithography II : technology for the 1980s, March 16-17, 1983, Santa Clara, California /Published 1983“...SPIE--the International Society for Optical Engineering,...”
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5Published 1984“...SPIE--the International Society for Optical Engineering,...”
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6Published 1987“...SPIE--the International Society for Optical Engineering,...”
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7Published 1987“...SPIE--the International Society for Optical Engineering,...”
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Conference Proceeding Book