Experimental performance of a micromachined heat flux sensor /

Experimental performance of a micromachined heat flux sensor /

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Bibliographic Details
Main Author: Stefanescu, S.
Corporate Author: Lewis Research Center
Other Authors: DeAnna, R. G., Mehregany, M.
Format: Government Document Book
Language:English
Published: [Cleveland, Ohio] : National Aeronautics and Space Administration, Lewis Research Center ; [1998]
Series:NASA technical memorandum ; 107517.
Subjects:
Micromachining.
Miniaturization.
Fabrication.
Polyimides.
Thin films.

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Call Number: NAS 1.15:107517
 
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