Dry etching for microelectronics /

Dry etching for microelectronics /

Bibliographic Details
Other Authors: Powell, Ronald A.
Format: Book
Language:English
Published: Amsterdam ; New York : North-Holland Physics Pub. ; 1984.
Series:Materials processing, theory and practices ; v. 4.
Subjects:
Semiconductors > Etching.
Plasma etching.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TK7871.85 .D79 1984
 
Call Number Status Get It
TK7871.85 .D79 1984 Available