Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.

Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.

Bibliographic Details
Corporate Authors: Union Carbide Corporation, United States. Department of Energy
Format: Government Document Book
Language:English
Published: [Washington] : Dept. of Energy ; 1979-
Series:DRD ; no. SE-6
Subjects:
Silane.
Pyrolysis.
Semiconductors.

Evans: US Documents Microfiche (3rd floor)

Holdings details from Evans: US Documents Microfiche (3rd floor)
Call Number: E 1.28:DOE/JPL/954334-
 
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