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| LEADER |
00000cam a2200000 i 4500 |
| 001 |
in00000815595 |
| 005 |
20151018115119.0 |
| 008 |
800730m19799999dcua f00010 eng d |
| 010 |
|
|
|a gp 80023784
|
| 020 |
|
|
|c pbk.
|
| 035 |
|
|
|a (OCoLC)06567723
|
| 035 |
|
|
|9 ADV3561AM
|
| 037 |
|
|
|b 22161
|
| 040 |
|
|
|a GPO
|c GPO
|d MvI-ocm
|d UtOrBLW
|
| 074 |
|
|
|a 429-T-4 (microfiche)
|
| 086 |
0 |
|
|a E 1.28:DOE/JPL/954334-
|
| 088 |
|
|
|a DOE/JPL/954334-
|
| 110 |
2 |
|
|a Union Carbide Corporation.
|
| 245 |
1 |
0 |
|a Low cost silicon array project :
|b experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
|
| 264 |
|
1 |
|a [Washington] :
|b Dept. of Energy ;
|c 1979-
|
| 264 |
|
2 |
|a [Springfield, Va.] :
|b [for sale by the National Technical Information Service],
|
| 300 |
|
|
|a volumes :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
|
|a volume
|b nc
|2 rdacarrier
|
| 490 |
0 |
|
|a DRD ; no. SE-6
|
| 500 |
|
|
|a "DOE/JPL/954334-11" ; "DOE/JPL/954334-12."
|
| 500 |
|
|
|a "DRL number 81."
|
| 500 |
|
|
|a Contract number NAS-7-100-954334.
|
| 650 |
|
0 |
|a Silane.
|
| 650 |
|
0 |
|a Pyrolysis.
|
| 650 |
|
0 |
|a Semiconductors.
|
| 710 |
1 |
|
|a United States.
|b Department of Energy.
|
| 999 |
|
|
|a MARS
|
| 999 |
f |
f |
|s 2326f1fa-3e3c-3e70-a40a-1c5fb2c1d5c5
|i 3bec2c9c-31d3-35ed-b228-590c8346cd66
|t 0
|
| 952 |
f |
f |
|p normal
|a Texas A&M University
|b College Station
|c Sterling C. Evans Library
|d Evans: US Documents Microfiche (3rd floor)
|t 0
|e E 1.28:DOE/JPL/954334-
|h Superintendent of Documents classification
|i unmediated -- volume
|k no.12
|m A14834966667
|
| 952 |
f |
f |
|p normal
|a Texas A&M University
|b College Station
|c Sterling C. Evans Library
|d Evans: US Documents Microfiche (3rd floor)
|t 0
|e E 1.28:DOE/JPL/954334-
|h Superintendent of Documents classification
|i unmediated -- volume
|k no.11
|m A14834966625
|
| 998 |
f |
f |
|a E 1.28:DOE/JPL/954334-
|t 0
|l Evans: US Documents Microfiche (3rd floor)
|