Low cost silicon array project : experimental process system development unit for producing semiconductor-grade silicon using the silane-to- silicon process.
| Corporate Authors: | , |
|---|---|
| Format: | Government Document Book |
| Language: | English |
| Published: |
[Washington] :
Dept. of Energy ;
1979-
|
| Series: | DRD ; no. SE-6
|
| Subjects: |