The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control /

The design, testing, and analysis of a comprehensive test pattern for measuring CMOS/SOS process performance and control /

Bibliographic Details
Main Author: Linholm, Loren W.
Corporate Authors: Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division, United States. National Bureau of Standards
Format: Government Document Book
Language:English
Published: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1981.
Series:Semiconductor measurement technology.
NBS special publication ; 400-66.
Subjects:
Microelectronics.
Integrated circuits.

Evans: US Documents Microfiche (3rd floor)

Holdings details from Evans: US Documents Microfiche (3rd floor)
Call Number: C 13.10:400-66
 
Call Number Status Get It
C 13.10:400-66 Available