Development and applications of optical interferometric micrometrology in the angstrom and subangstrom range /

Bibliographic Details

Main Author:	Lauer, James L.
Corporate Author:	United States. National Aeronautics and Space Administration
Other Authors:	Abel, Phillip B.
Format:	Government Document Book
Language:	English
Published:	[Washington, D.C.] : National Aeronautics and Space Administration ; [1988]
Series:	NASA technical memorandum ; 100299.
Subjects:	Interferometry.