Optical/laser microlithography V : 11-13 March 1992, San Jose, California /

Optical/laser microlithography V : 11-13 March 1992, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Cuthbert, John D.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1992]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1674.
Subjects:
Lasers > Industrial applications > Congresses.
Optical instruments > Congresses.
Microlithography > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TA1677 .O67 1992
Library Owns: TA1677 .O67 1992 (pt.1-pt.2)
Call Number Status Get It
TA1677 .O67 1992 pt.1 Available
TA1677 .O67 1992 pt.2 Available