Optical/laser microlithography : 3-5 March 1993, San Jose, California /

Optical/laser microlithography : 3-5 March 1993, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Cuthbert, John D.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1993]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1927.
Subjects:
Lasers > Industrial applications > Congresses.
Optical instruments > Congresses.
Microlithography > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TA1677 .O67 1993
Library Owns: TA1677 .O67 1993 (pt.1-pt.2)
Call Number Status Get It
TA1677 .O67 1993 pt.1 Available
TA1677 .O67 1993 pt.2 Available