Radio frequency power in plasmas : tenth topical conference, Boston, Ma., April 1993 /

Bibliographic Details
Corporate Authors:	Topical Conference on Radio Frequency Power in Plasmas Boston, Mass., American Institute of Physics
Other Authors:	Porkolab, Miklos, Hosea, J.
Format:	Conference Proceeding Book
Language:	English
Published:	New York : American Institute of Physics, 1994.
Series:	AIP conference proceedings ; no. 289.
Subjects:	Plasma (Ionized gases) > Congresses. Plasma heating > Congresses. Radio frequency > Congresses.