Growth of high-quality thin-film Ge single crystals by plasma-enhanced chemical vapor deposition.

Bibliographic Details
Main Author: Outlaw, R. A.
Corporate Author: United States. National Aeronautics and Space Administration. Scientific and Technical Information Branch
Other Authors: Hopson, P.
Format: Government Document Book
Published: [Washington, DC] : National Aeronautics and Space Administration, Scientific and Technical Information Branch ; 1986.
Series:NASA technical paper ; 2532.

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Call Number: N86-20586
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