Growth of high-quality thin-film Ge single crystals by plasma-enhanced chemical vapor deposition.
Main Author: | Outlaw, R. A. |
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Corporate Author: | United States. National Aeronautics and Space Administration. Scientific and Technical Information Branch |
Other Authors: | Hopson, P. |
Format: | Government Document Book |
Language: | English |
Published: |
[Washington, DC] :
National Aeronautics and Space Administration, Scientific and Technical Information Branch ;
1986.
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Series: | NASA technical paper ;
2532. |
Subjects: |