Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado /

Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Stover, John C.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [1996]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2862.
Subjects:
Semiconductor wafers > Measurement > Congresses.
Surface roughness > Measurement > Congresses.
Flatness measurement > Congresses.

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Call Number: TK7871.85 .F62 1996
 
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TK7871.85 .F62 1996 Available