Handbook of microlithography, micromachining, and microfabrication /
Other Authors: | |
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Format: | Book |
Language: | English |
Published: |
Bellingham, Wash., USA : London, UK :
SPIE Optical Engineering Press ; Institution of Electrical Engineers,
[1997-]
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Series: | IEE materials & devices series ;
12. |
Subjects: |
Evans: Library Stacks
Call Number: |
TK7836 .H3423 1997 |
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Library Owns: TK7836 .H3423 1997 | (v.1-v.2) | |
Call Number | Status | Get It |
TK7836 .H3423 1997 v.1 | Available | |
TK7836 .H3423 1997 v.2 | Available |