Rai-Choudhury, P. (1997). Handbook of microlithography, micromachining, and microfabrication. SPIE Optical Engineering Press ; Institution of Electrical Engineers.
Chicago Style (17th ed.) CitationRai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. Bellingham, Wash., USA : London, UK: SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.
MLA (8th ed.) CitationRai-Choudhury, P. Handbook of Microlithography, Micromachining, and Microfabrication. SPIE Optical Engineering Press ; Institution of Electrical Engineers, 1997.
Warning: These citations may not always be 100% accurate.