Handbook of microlithography, micromachining, and microfabrication /

Handbook of microlithography, micromachining, and microfabrication /

Bibliographic Details
Other Authors: Rai-Choudhury, P.
Format: Book
Language:English
Published: Bellingham, Wash., USA : London, UK : SPIE Optical Engineering Press ; Institution of Electrical Engineers, [1997-]
Series:IEE materials & devices series ; 12.
Subjects:
Microlithography.
Micromachining.
Microfabrication.
Description
Item Description:"SPIE Press monograph PM39."
Physical Description:volumes <1 > : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819423785 (v. 1)