Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California /

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Stover, John C.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [1998]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3275.
Subjects:
Semiconductor wafers > Measurement > Congresses.
Surface roughness > Measurement > Congresses.
Flatness measurement > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7871.85 .F62 1998
 
Call Number Status Get It
TK7871.85 .F62 1998 Available