Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /

Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /

Bibliographic Details
Other Authors: Merhari, Lhadi
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2000]
Series:Materials Research Society symposia proceedings ; v. 584.
Subjects:
Integrated circuits > Design and construction > Congresses.
Nanotechnology > Congresses.
Integrated circuits > Materials > Congresses.
Molecular electronics > Congresses.
Microlithography > Congresses.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TK7874 .M3439 2000
 
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TK7874 .M3439 2000 Available