Plasma processing XIII : proceedings of the International Symposium /

Plasma processing XIII : proceedings of the International Symposium /

Bibliographic Details
Corporate Authors: Symposium on Plasma Processing Toronto, Canada, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. Meeting, International Symposium on Plasma Processing
Other Authors: Mathad, G. S.
Format: Conference Proceeding Book
Language:English
Published: Pennington, NJ : Electrochemical Society, [2000]
Series:Proceedings (Electrochemical Society) ; 2000-6.
Subjects:
Semiconductors > Etching > Congresses.
Plasma etching > Congresses.

Evans: Library Stacks

Holdings details from Evans: Library Stacks
Call Number: TA2020 .S95 2000
 
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TA2020 .S95 2000 Available