Process and equipment control in microelectronic manufacturing II : 30-31 May 2001, Edinburgh, UK /

Process and equipment control in microelectronic manufacturing II : 30-31 May 2001, Edinburgh, UK /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers
Other Authors: Fallon, Martin
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2001]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4405.
Subjects:
Microelectronics industry > Production control > Congresses.
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Microelectronics > Materials > Congresses.
Description
Physical Description:v, 158 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819441066