Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January 2004, San Jose, California, USA /

Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Tanner, Danelle Mary, 1952-, Ramesham, Rajeshuni
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343.
Subjects:
Microelectromechanical systems > Reliability > Congresses.
Microelectromechanical systems > Testing > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7875 .R45 2004
 
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TK7875 .R45 2004 Available