Ion beam and plasma methods of producing diamondlike carbon films /

Bibliographic Details

Main Author:	Swec, Diane M.
Corporate Author:	United States. National Aeronautics and Space Administration
Other Authors:	Mirtich, Michael J., Banks, Bruce A.
Format:	Government Document Book
Language:	English
Published:	[Washington, D.C.] : National Aeronautics and Space Administration, [1989]
Series:	NASA technical memorandum ; 102301.
Subjects:	Carbon. Deposition. Diamonds. Protective coatings. Sputtering. Thin films.
Online Access:	https://purl.fdlp.gov/GPO/LPS108050