Dry etching technology for semiconductors /

This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which pa...

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Bibliographic Details

Main Author:	Nojiri, Kazuo (Author)
Corporate Author:	EBSCOhost
Format:	eBook
Language:	English
Published:	Cham : Springer, [2015]
Subjects:	Plasma etching. Semiconductors > Etching. TECHNOLOGY & ENGINEERING / Mechanical. Electronic books.
Online Access:	Connect to the full text of this electronic book