Introduction to metrology applications in IC manufacturing /
Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial T...
Main Authors: | , , |
---|---|
Format: | Book |
Language: | English |
Published: |
Bellingham, Washington :
SPIE,
[2015]
|
Series: | Tutorial texts in optical engineering ;
v. TT 101. |
Subjects: |
Evans: Library Stacks
Call Number: |
TK7874.58 .S82 2015 |
|
---|---|---|
Call Number | Status | Get It |
TK7874.58 .S82 2015 | Checked out |