Run-to-run control in semiconductor manufacturing /

Bibliographic Details
Corporate Author:	Taylor & Francis
Other Authors:	Moyne, James, Del Castillo, Enrique, Hurwitz, Arnon Max
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2001.
Subjects:	Semiconductors > Design and construction. Semiconductor industry > Production control. Electronic packaging. Production management. Electronic books.
Online Access:	Connect to the full text of this electronic book