Optical inspection of microsystems /

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued...

Full description

Bibliographic Details

Corporate Author:	Taylor & Francis
Other Authors:	Osten, Wolfgang (Editor)
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press/Taylor and Francis Group, [2020]
Edition:	Second edition.
Subjects:	Microelectromechanical systems > Inspection. Quality control > Optical methods. Optical measurements. Industrial microscopy. TECHNOLOGY & ENGINEERING / Industrial Engineering. TECHNOLOGY & ENGINEERING / Industrial Technology. TECHNOLOGY & ENGINEERING / Manufacturing. TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades. Electronic books.
Online Access:	Connect to the full text of this electronic book